Electrical characteristics of argon radio frequency glow dischargesin an asymmetric cell

Measurements of the current and voltage at both electrodes of a parallel-plate, capacitively coupled RF discharge cell (the Gaseous Electronics Conference Reference Cell) were combined with measurements of the voltage on a wire inserted into the glow region between the electrodes, for argon discharges at pressures of 1.3-133 Pa and peak-to-peak applied voltages ⩽400 V. Together, these measurements determined the RF voltage, current, impedance, and power of each sheath of the plasma. Simple power laws were found to describe changes in sheath impedances observed as voltage and pressure were varied. An equivalent circuit model for the electrical behavior of the discharge was obtained. The equivalent circuit model can be used to relate the electrical data to plasma properties such as electron densities, ion currents, and sheath widths. The results differ from models previously proposed for asymmetric RF discharges, and the implications of this disagreement are discussed