H NMR in μc-Si:H

NMR, IR, ESR, Raman scattering and X-ray diffraction measurements were performed in μc-Si:H prepared by various methods. Results of H NMR in some films are qualitatively similar to those i n a-Si:H, but the NMR lines exhibit a motional narrowing. Other films which exhibit sharp IR peaks exhibit H NMR signal shape different from that in a-Si:H.