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Laser produced amorphous phases in NbSi and VSi thin films
Authors:K. Affolter  M. von Allmen  H.P. Weber  M. Wittmer
Affiliation:Institute of Applied Physics, University of Bern, CH-3012 Bern, Switzerland;Brown-Boveri Research Center, CH-5405 Baden, Switzerland
Abstract:The binary systems NbSi and VSi are investigated by laser induced melting and quenching of vapor deposited thin films. Glassy phases of various compositions are produced. The established compositional glass forming ranges support that the equilibrium compounds Nb4Si is stable only at high temperature. Thermal decomposition of the amorphous NbSi films proceeds via several intermediate stages. In particular, the AuCu3-type configuration of Nb3Si was found to be formed. In addition, amorphous NbSi films around 20 at.% si show the formation of an undentified metastable compounds upon post-irradiation annealing. Amorphous VSi films proved to be stable up to at least 500°C. Above this temperature they decompose directly into their respective equilibrium phases.
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