| Triphenylphosphine Stabilized Silver Carboxylates |
| |
| 作者姓名： | JianLinHAN YingZhongSHEN YiPAN |
| |
| 作者单位： | National863ProgramNewMaterialMOPrecursorsR＆DCenter,NationalKeyLabofCoordinationChemistry,SchoolofChemistryandChemicalEngineering,NanjingUniversity,Nanjing210093 |
| |
| 摘 要： | A series of novel triphenylphosphine stabilized silver carboxylates, potential precursors for CVD growth of ultrafast interconnection link in microelectronic devices, have been prepared and characterized.
|
| 关 键 词： | 三苯基膦 羧酸盐 银 薄膜材料 化学气相沉积法 热稳定性 |
Triphenylphosphine Stabilized Silver Carboxylates |
| |
| JianLinHAN YingZhongSHEN YiPAN.Triphenylphosphine Stabilized Silver Carboxylates[J].Chinese Chemical Letters,2005,16(4):443-444. |
| |
| Authors: | Jian Lin HAN Ying Zhong SHEN Yi PAN National Program New Material MO Precursors R&D Center National Key Lab of Coordination Chemistry School of Chemistry and Chemical Engineering Nanjing University Nanjing |
| |
| Institution: | Jian Lin HAN,Ying Zhong SHEN,Yi PAN National 863 Program New Material MO Precursors R&D Center,National Key Lab of Coordination Chemistry,School of Chemistry and Chemical Engineering,Nanjing University,Nanjing 210093 |
| |
| Abstract: | A series of novel triphenylphosphine stabilized silver carboxylates, potential precursors for CVD growth of ultrafast interconnection link in microelectronic devices, have been prepared and characterized. |
| |
| Keywords: | CVD precursor interconnect triphenylphosphine silver carboxylate |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
