XPS study of silicon surface after ultra-low-energy ion implantation |
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Authors: | Kazuhiro Yamamoto Hiroshi Itoh |
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Affiliation: | Research Institute of Instrumental Frontier, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan |
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Abstract: | Ultra-low-energy ion implantation of silicon with a hydrogen-terminated (0 0 1) surface was carried out using a mass-separated 31P+ ion beam. The ion energy was 30 eV, the displacement energy of silicon, and the ion doses were 6 × 1013 ions/cm2. Annealing after the implantation was not carried out. The effects of ion implantation on the surface electrical state of silicon were investigated using X-ray photoelectron spectroscopy (XPS). The Si 2p peak position using XPS depends on the doping conditions because the Fermi level of the hydrogen-terminated silicon surface is unpinned. The Si 2p peak position of the specimen after ion implantation at a vacuum pressure of 3 × 10−7 Pa was shifted to the higher energy region. It suggested the possibility of phosphorus doping in silicon without annealing. In the case of ion implantation at 5 × 10−5 Pa, the Si 2p peak position was not shifted, and the peak was broadened because of the damage by the fast neutrals. Ultra-low-energy ion doping can be achieved at ultra-high-vacuum conditions. |
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Keywords: | Silicon Ion implantation Doping Phosphorus Surface X-ray photoelectron spectroscopy |
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