Repetitive low-pressure volume discharge induced by attachment instability in an Ar/Cl2 mixture |
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Authors: | A. K. Shuaibov |
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Affiliation: | (1) Uzhhorod National University, Uzhhorod, 88000, Ukraine |
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Abstract: | Ignition conditions and the characteristics of a repetitive volume discharge with a spherical anode and plane cathode are investigated. The discharge was ignited in Ar/Cl2 mixtures (P≤2.0 kPa) used in excimer halogen lamps operating on the ArCl (B-X) 175-nm, Cl2(D′-A′) 257-nm, and Cl 2 ** 195-to 200-nm molecular bands. At an interelectrode distance of 3 cm and a dc anode voltage of U ch ≤1 kV, a stable repetitive pulsed discharge with a repetition rate of 1–50 kHz was ignited in chlorine or (0.1–2.0)/(0.04–0.12)-kPa Ar/Cl2 mixtures. The development of attachment instability in the discharge plasma, in which the processes of the formation, decay, and diffusion of the Cl 2 − and Cl− negative ions play an important role, leads to the formation of a solitary pearlike plasma domain with an average diameter of 0.2–3.5 cm. |
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