| 各向异性表面的椭偏测量的消光过程 |
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| 引用本文： | 梁民基.各向异性表面的椭偏测量的消光过程[J].光学学报,1991,11(7):65-668. |
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| 作者姓名： | 梁民基 |
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| 作者单位： | 北京轻工业学院自动化工程系 北京 |
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| 摘 要： | 本文描述了在正向入射条件下,当待测的各向异性反射面(如全息光栅)的两个笛卡儿本征矢方向与系统的指向有微小偏离时,椭偏测量的消光过程由理想的两步过程转变成多步过程。文中同时定量指出该偏离所造成的影响及应用。
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| 关 键 词： | 椭偏测量 光栅 消光 |
| 收稿时间： | 1990/10/3 |
Nulling procedures used in the ellipsometry for anisotropic surface |
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| LIANG MINJI.Nulling procedures used in the ellipsometry for anisotropic surface[J].Acta Optica Sinica,1991,11(7):65-668. |
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| Authors: | LIANG MINJI |
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| Abstract: | This paper describes the nulling procedures used in the ellipsometry for anisotro pic surface (e.g., holographic grating) transformed into multi-step regulations from ideal two-step ones, if the orientation of two cartesian eigenvectors of the sample surface deviate a small angle from that of ellipsometer. The influence of this devation and its application are also discussed. |
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| Keywords: | ellipsometry grating |
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