A linear Bragg–Fresnel optics fabricated for 1D focusing of 18 nm X-ray radiation |
| |
Authors: | Zichun Le Jingqiu Liang Jinsong Yao Chun Li |
| |
Abstract: | The theoretical and technique results of a 1D focusing linear Bragg–Fresnel optics working at 18 nm X-ray radiation are given in the present paper. A theoretical method describing its optical performances is introduced briefly, the parameters of the diffraction pattern are presented. The preparation of multilayer mirrors, the decision of X-ray absorber layer thickness and the fabrication process of the diffraction pattern are described. The studied results of thermal and chemical stabilities for Mo/Si multilayer structure are shown. Some measured results for the 1D focusing linear Bragg–Fresnel optics are given. |
| |
Keywords: | Linear Bragg– Fresnel optics Fabrication Diffraction pattern Mo/Si multilayer |
本文献已被 ScienceDirect 等数据库收录! |