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A linear Bragg–Fresnel optics fabricated for 1D focusing of 18 nm X-ray radiation
Authors:Zichun Le   Jingqiu Liang   Jinsong Yao  Chun Li
Abstract:The theoretical and technique results of a 1D focusing linear Bragg–Fresnel optics working at 18 nm X-ray radiation are given in the present paper. A theoretical method describing its optical performances is introduced briefly, the parameters of the diffraction pattern are presented. The preparation of multilayer mirrors, the decision of X-ray absorber layer thickness and the fabrication process of the diffraction pattern are described. The studied results of thermal and chemical stabilities for Mo/Si multilayer structure are shown. Some measured results for the 1D focusing linear Bragg–Fresnel optics are given.
Keywords:Linear Bragg–  Fresnel optics   Fabrication   Diffraction pattern   Mo/Si multilayer
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