Ellipsometrical determination of barrier thicknesses of metal-insulator-metal tunnel junctions |
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| Authors: | K. Knorr J.D. Leslie |
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| Affiliation: | Institut Von Laue-Langevin, BP No. 156, 38042 - Grenoble Cédex, France;Centre de Recherches sur les Très Basses Températures, Grenoble, France |
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| Abstract: | The thickness of the tunneling barrier of AlAlxOyAl and AlAlxOyPb junctions was determined using an automated ellipsometer. It is shown that the tunneling resistance depends exponentially on the barrier thickness. A practical consequence is that any wanted tunneling resistance can be realized within the accuracy of half an order of magnitude. |
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