Simultaneous SIMS and EID investigation on the interaction of oxygen with a W (100) surface

A UHV system, containing a beatable tungsten ribbon target (showing 100] planes), an ion source (Ar⁺, 2 keV) with mass separator, an electron source (300 eV), a quadrupole secondary ion mass filter, and a quadrupole gas analyzer is used for the study of the interaction of O₂ with W (100) by simultaneous, i.e. fast interchanging, “static” SIMS (secondary ion-induced] ion mass spectrometry) and EID (electron-induced ion] desorption). Two different adsorptive binding states can be distinguished: β₂ and β₁. The O⁺ emission cross section under electron bombardment from the β₂ state is smaller by a factor of about 10³ than from β₁ and is found to be temperature-dependent. After the state β₂ has been saturated and before the occupation of β₁ begins, an oxide formation process starts. This oxidation can be interpreted by a two-stage model.