Investigation of surface reactions by the static method of secondary ion mass spectrometry: III. The oxidation of vanadium,niobium and tantalum in the monolayer range |
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| Authors: | A. Müller A. Benninghoven |
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| Affiliation: | I. Physikalisches Institut der Universität Köln, Universitätsstr. 14, 5 Köln 41, West-Germany |
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| Abstract: | By means of the static method of secondary ion mass spectrometry the oxidation of a polycrystalline vanadium, niobium, and tantalum surface, cleaned by ion bombardment was investigated in the oxygen dose range up to 1000 L at room temperature. Two different oxide phases with different sputtering rates were found, one covering the other. |
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