| 快速前处理TFA-MOD制备YBCO超导薄膜的研究 |
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| 引用本文： | 丁灵效,陈文祥,熊杰,陶伯万.快速前处理TFA-MOD制备YBCO超导薄膜的研究[J].低温与超导,2009,37(4). |
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| 作者姓名： | 丁灵效 陈文祥 熊杰 陶伯万 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054 |
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| 摘 要： | 三氟乙酸盐金属有机物沉积(TFA-MOD)方法是制备YBa2Cu3O7(YBCO)超导薄膜最有应用前景的方法之一。采用快速前处理TFA-MOD的方法在LaAlO3单晶基片上生长YBCO薄膜并与常规的TFA-MOD方法进行对比研究。XRD分析表明用快速前处理TFA-MOD方法制备的YBCO薄膜的c轴取向一致性,没有常规的TFA-MOD制备的YBCO薄膜好。SEM的分析表明快速前处理TFA-MOD制备的YBCO超导薄膜表面有孔洞和YBCO(103)取向生长的晶粒,常规方法制备的YBCO薄膜表面比较光滑,孔洞较少。虽然较常规方法制备的薄膜的临界电流密度(JC)低,但超导电性能分析表明,快速前处理方法制备的YBCO薄膜JC达到1mA/cm2以上,且前处理时间大幅缩短,对于提高YBCO薄膜制备的效率非常有效。
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| 关 键 词： | YBCO TFA-MOD 快速前处理 |
Study on the growth of YBCO films deposited by rapid pyrolysis process TFA-MOD |
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| Ding Lingxiao,Chen Wenxiang,Xiong Jie,Tao Bowan.Study on the growth of YBCO films deposited by rapid pyrolysis process TFA-MOD[J].Cryogenics and Superconductivity,2009,37(4). |
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| Authors: | Ding Lingxiao Chen Wenxiang Xiong Jie Tao Bowan |
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| Institution: | State Key Laboratory of Electronic Thin Films and Integrated Devices;University of Electronic Science and Technology of China;Chengdu 610054;China |
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| Abstract: | Trifluoroacetate metal organic deposition(TFA-MOD) is one of the most promising methods for depositing YBa2Cu3O7(YBCO) film.In this paper,the rapid pyrolysis process TFA-MOD for growth of YBCO films deposited on(00l) LaAlO3 was investigated and compared with traditional TFA-MOD.X-ray diffraction analysis shows that the YBCO films deposited by the rapid pyrolysis process TFA-MOD have worse c-axis orientation than those deposited by the traditional TFA-MOD.SEM analysis shows that there are lots of pores and Y... |
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| Keywords: | YBCO TFA-MOD |
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