|
|||||
|
|
Synchrotron X-ray topographic study of strain in silicon wafers with integrated circuits |
|
| Authors: | M Karilahti T Tuomi M Taskinen J Tulkki H Lipsanen P McNally |
| Institution: | 1. Optoelectronics Laboratory, Helsinki University of Technology, FIN-02150, Espoo, Finland 2. School of Electronic Engineering, Dublin City University, Dublin 9, Ireland |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |