高精度绿激光显微精密修调机的研制

介绍了自行研制的绿激光显微精密修调机，分析了其系统组成结构。该系统主要由激光器系统、激光聚焦及定位光学系统、精密数控系统及自动化测试系统组成。采用的半导体端面泵浦Nd：YVO4电光调Q倍频532nm激光器，保证了较高的峰值功率密度和光束质量，激光聚焦及定位光学系统保证了更小的聚焦光斑。经测试表明绿激光显微精密修调机的生产效率比国外同类设备提高了近50％，其技术指标达到了预期要求。

High-Precision Green Laser Trimming System of Resistor

A green laser trimming system of resistor is introduced in this paper, and its system construction is analyzed as well. The system is mainly made up of laser system, optical system of laser focus and location, precision numerical control system and automatic testing system. The laser we used is an electro-optic Q-switched double-frequenced Nd ： YVO4 laser, which ensures high-power- density and excellent-profile laser. The construction of optical system of laser focus and location ensures that we can get smaller focus spot. The test results show that the production efficiency of the laser trimming system is raised 50% comparing with the foreign product at the same term. Its techinic targets reach the requirement.