Molecular depth profiling of trehalose using a C60 cluster ion beam |
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| Authors: | Andreas Wucher Juan Cheng |
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| Affiliation: | a Department of Physics, University of Duisburg-Essen, D-47048 Duisburg, Germany
b Department of Chemistry, Pennsylvania State University, University Park, PA 16802, USA |
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| Abstract: | Molecular depth profiling of organic overlayers was performed using a mass selected fullerene ion beam in conjunction with time-of-flight (TOF-SIMS) mass spectrometry. The characteristics of depth profiles acquired on a 300-nm trehalose film on Si were studied as a function of the impact kinetic energy and charge state of the C60 projectile ions. We find that the achieved depth resolution depends only weakly upon energy. |
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| Keywords: | Molecular depth profiling 3D imaging Depth scale calibration |
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