Institution: | a Department of Chemical Engineering and Materials Science, Wayne State University, 5050 Anthony Wayne Dr., Detroit, MI 48202, USA b Smart Sensors and Integrated Microsystems, Wayne State University, 5050 Anthony Wayne Dr., Detroit, MI 48202, USA c Institute for Manufacturing Research, Wayne State University, 666 Hancock Ave., Detroit, MI 48202, USA d Fraunhofer Center for Laser Technology, 46025 Port St., Plymouth, MI 48170, USA |