The effect of angle of incidence to low damage sputtering of organic polymers using a C60 ion beam |
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Authors: | Takuya Miyayama Noriaki Sanada John S Hammond |
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Institution: | a ULVAC-PHI, Inc., 370 Enzo, Chigasaki 253-8522, Japan b Physical Electronics, 18725 Lake Drive East, Chanhassen, MN 55317, USA |
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Abstract: | The effect of angle of incidence of C60 ion beam for low damage polymer depth profiling on TOF-SIMS and XPS has been investigated. In this study, TOF-SIMS and XPS depth profiles were taken at several angles of incidence of C60 ion beam and the results were compared with each other. By using a higher angle of incidence, in XPS analysis, the changes of atomic concentration for polyethyleneterephthalate (PET) were suppressed. In TOF-SIMS analysis, the degradations of fragment ion intensity for PET and polystyrene (PS) were also suppressed at a higher angle of incidence. Although the information depth of TOF-SIMS is different from that of XPS, both results suggested that a higher angle of incidence is a better condition for low damage polymer depth profiling. |
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Keywords: | C60 Angle of incidence TOF-SIMS XPS Polyethyleneterephthalate Polystyrene |
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