| Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement |
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| 作者姓名： | 何国田 王向朝 曾爱军 唐锋 |
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| 作者单位： | Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai Hengyi Optics & Fine Mechanics Co. Ltd.，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 Graduate School of the Chinese Academy of Sciences，Beijing 100039，Shanghai 201800，Shanghai 201800，Shanghai 201800 |
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| 基金项目： | This work was supported by National Natural Science Foundation of China (No. 60578051)，International Cooperation Program of Shanghai Municipal Science & Technology Commission (No. 051107085). |
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| 摘 要： | A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 x 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.
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