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Chemical structure of ultrathin thermally grown oxides on a Si(100)-wafer using core level photoemission
Institution:1. State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China;2. Institute for Computational Mechanics and Its Applications, Northwestern Polytechnical University, Xi’an 710072, China;3. State Key Laboratory for Strength and Vibration of Mechanical Structures, School of Aerospace Engineering, Xi’an Jiaotong University, Xi’an 710049, China;4. Mechanical Engineering, University of Cincinnati, Cincinnati, OH 45221-0072, USA
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