Generalized ellipsometric method for the determination of all the optical constants of the system: Optically absorbing film on an absorbing substrate |
| |
| Authors: | M. Malin K. Vedam |
| |
| Affiliation: | Materials Research Laboratory and Department of Physics. The Pennsylvania State University, University Park, Pennsylvania 16802, USA |
| |
| Abstract: | A numerical method has been developed to evaluate all the optical parameters of the system of an optically absorbing film on an absorbing substrate using ellipsometric measurements. The generality and validity of the algorithm has been investigated for different ideal cases. In addition the effects of the actual limited precision of ellipsometric measurements as well as the problem of multiple solutions have been studied. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
