Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layer

Various ellipsometric analyses have been derived to characterize the optical properties of a single-layer or a double-layer surface film overlaid on a substrate material. The general numerical technique is independent of the method (or methods) used in the series of ellipsometric measurements which provide the raw data. The convergence to unambiguously determined values of the unknown parameters is systematically carried out in the numerical search procedure. Selected examples are presented to illustrate the validity of various analyses and the possible usage of these analyses to optimize the experimental conditions and measurement methods.