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De-excitation processes near the surface of ion bombarded SiO2 and Si |
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| Authors: | P.J Martin A.R Bayly R.J Macdonald N.H Tolk G.J Clark J.C Kelly |
| Affiliation: | Department of Physics, The Australian National University, Canberra, Australia 2601;Bell Telephone Laboratories, Murray Hill, New Jersey 07974, USA;Division of Mineral Physics, CSIRO, North Ryde, NSW, Australia;Department of Physics, University of New South Wales, Kensington, NSW, Australia |
| Abstract: | Ion bombardment induced secondary ion and optical excitation from oxide coated Si has been studied as the oxide layer is eroded away. By comparing ion and photon yields, a model for the role of resonant and Auger electron transitions in the neutralisation and de-excitation of the sputtered atoms and ions has been suggested. |
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