Formation of an ensemble of nanoclusters under rapid deposition of atoms on a surface

The results of an experimental study of the formation of nanometer-size Au clusters on NaCl(100) and HOPG(0001) surfaces under pulsed laser deposition are presented. No clusters of small sizes (d ≤ 1 nm) have been found in the cluster size distribution. The distribution itself at d < 5 nm has the form of a percolation distribution. It has been established that the perimeter of clusters with sizes d < 5 nm has a fractal structure. The fractal dimension of clusters is different for NaCl(100) and HOPG(0001) surfaces with different symmetries; it decreases with increasing cluster size from D _f ≈ 1.2–1.4 at d ≈ 1.5 nm to D _f ≈ 1 at d ≈ 5 nm. A physical mechanism of nanocluster formation is suggested. Under pulsed laser deposition, the attainable densities of adatoms are close to the percolation threshold in the region of thermodynamically unstable states and many-particle correlation regions are formed in a spatially inhomogeneous adsorbate. Clusters are formed on the surface from many-particle correlation regions in several diffusion jumps. The suggested mechanism allows the fractal dimension of the clusters forming on surfaces with different symmetries, its dependence on cluster size, and the cluster size distribution functions to be calculated.