Molecular dynamics simulation of thin film formation by energetic cluster impact (ECI)

Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo₁₀₂₄ clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.