Proton-exchanged waveguiding layers in Y-cut lithium niobate: Analysis of the phase composition by spectroscopic methods

A combination of methods was used for analysis of the phase composition of proton-exchanged layers in Y-cut lithium niobate. Mode spectra were used for the determination of phases. Vibration spectra allow some comparative and semi-quantitative estimations of the thickness of phase sub-layers to be made. The demonstrated method can contribute to adjustment of fabrication conditions for obtaining of defined phase compositions needed for waveguide devices with improved stability and characteristics.It was shown that deep and strongly protonated waveguides in Y-cut LiNbO₃ could be obtained at specific technological regimes.