Analytical Calculation of Sensitivity for Capacitive Pressure Transducers |
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Authors: | Á . Ková cs,Zs. Ví zvá ry |
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Abstract: | Calculation of sensitivity for capacitive pressure transducers requires the integration of the deflection function of a clamped‐edge thin diaphragm. For typical square‐formed diaphragms we integrated analytically a closed form deflection function obtained by the Ritz‐method. This exact integration enables fast and accurate simulation. |
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