| 利用金刚石纳米粉引晶方法制备高硼掺杂金刚石薄膜 |
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| 引用本文： | 杨传径,陈庆东,杜凯,高春晓,刘才龙.利用金刚石纳米粉引晶方法制备高硼掺杂金刚石薄膜[J].河南科技大学学报(自然科学版),2009,30(3). |
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| 作者姓名： | 杨传径 陈庆东 杜凯 高春晓 刘才龙 |
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| 作者单位： | 1. 河南科技大学,理学院,河南,洛阳,471003
2. 吉林大学,超硬材料国家重点实验室,吉林,长春,130012 |
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| 摘 要： | 利用金刚石纳米粉引晶方法在SiO2衬底上合成了高硼掺杂金刚石薄膜,并利用范德堡法、扫描电镜、激光拉曼方法对不同掺杂量下生长的样品进行了表征.SEM和拉曼谱分析表明,少量掺杂时有利于提高金刚石薄膜的质量,但是随着掺杂量的增加,金刚石薄膜质量开始明显下降;并且拉曼谱峰在500 cm-1和1200 cm-1开始加强,呈现重掺杂金刚石薄膜的典型特征.其电导率随着温度升高而升高,表明导电性质为半导体导电.
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| 关 键 词： | 热丝 纳米引晶 掺杂金刚石薄膜 |
High B-doped Diamond Film Grown by Seeding with Diamond Powder |
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| YANG Chuan-Jing,CHEN Qing-Dong,Du Kai,GAO Chun-Xiao,LIU Chai-Long.High B-doped Diamond Film Grown by Seeding with Diamond Powder[J].Journal of Henan University of Science & Technology:Natural Science,2009,30(3). |
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| Authors: | YANG Chuan-Jing CHEN Qing-Dong Du Kai GAO Chun-Xiao LIU Chai-Long |
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| Institution: | 1.Science College;Henan University of Science & Technology;Luoyang 471003;China;2.State Key Laboratory of Superhard Materials;Jilin University;Changchun 130012;China |
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| Abstract: | High B-doped diamond film was deposited successfully by seeding with the diamond powder of 5nm average size and the effects of B-concentration on diamond film deposited were studied through SEM,Raman scattering and measuring conductance with four probe array method.The doped diamond film quality with 0.5mg is better than non-doped diamond film.But the doped diamond film quality falls with increasing of B-powder through Raman spectroscopy.The Raman spectroscopy increases at 500cm-1 and 1200cm-1 with B-concen... |
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| Keywords: | CVD |
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