Bohm velocity with a two-temperature distribution of negativeparticles |
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| Authors: | Boswell R.W. Lichtenberg A.J. Vender D. |
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| Affiliation: | Plasma Res. Lab., Australian Nat. Univ., Canberra, ACT; |
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| Abstract: | A one-dimensional simulation of a low-pressure RF-driven discharge is used to verify the theoretical prediction of the Bohm velocity of ions at the sheath edge for a two-temperature electron distribution. Simulation results indicate that the Bohm velocity is geared to the cooler species, provided that it contains most of the electrons. A similar comparison is performed for an electronegative plasma |
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