衍射光强取样分析法测定划痕宽度:实验部分 |
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引用本文: | 戴名奎 徐德衍. 衍射光强取样分析法测定划痕宽度:实验部分[J]. 光学学报, 1998, 18(1): 0-94 |
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作者姓名: | 戴名奎 徐德衍 |
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作者单位: | 中国科学院上海光学精密机械研究所 |
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摘 要: | 根据衍射光强取样分析法理论部分的测量原理设计了一套实验方案,比较了该方法一义、显痛实际宽度的测试结果,给出了其对测量误差,并分析了误差的主要来泊,该方法速度快,精度高,有推广和应用的价值。
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关 键 词: | 衍射花样 划痕宽度测量 衍射光强 取样分析 |
收稿时间: | 1997-01-15 |
Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment |
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Abstract: | An experimental arrangement has been built for measuring scratch width by sampling diffracted-light intensity. Using this arrangement, several specimen are measured, and the scratches widths can be obtained efficiently and quickly. In general case, the measuring error is smaller than ±15%. |
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Keywords: | diffraction pattern scratch width measurement |
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