用于近场集成光学头的面阵平面微透镜

讨论了采用常规的光刻热熔法及灰度掩模技术制作非梯度折射率型平面折射和平面衍射微透镜的情况。定性地分析了在不同的工艺条件下可能得到的平面端面微光学器件的种类和形貌特征。给出了在石英衬底表面通过光刻热熔工艺和氢离子束蚀刻所得到的球面及圆弧轮廓特征的凹形掩模的SEM照片 ,并对用于近场集成光学头的平面微透镜和半导体激光器的集成结构作了初步分析。利用这一技术所制成的平面折射微透镜可以很方便地与半导体光源等器件匹配耦合及集成固联

Large-area planar microlens for integrated near-field optical head

Large area non gradient index planar microlens (refractive and difractive microlens) are fabricated by both the common thermal treatment method and gray level masking technique. The microstructure and microappearance of several devices with planar end face are analyzed qualitatively. SEM measurement is carried out to determine the dimension and the surface morphology of the microlens array in quedz substrate. The integrated structures of the planar microlens and semiconductor laser device of integrated near field optical head are discussed respectively.