| Abstract: | The capacitance and voltage (C-V) characteristics of Metal-Oxide-silicon (MOS) capacitors passivated by CaF2-B2O3-GeO2-SiO2 glasses with OHm ions, water and fluoride contents were investigated. As the OHm absorption coefficients of the glass increased, adverse effects on the recovery of hysteresis C-V curve shifts was observed. The content of OHm ions is closely related to the fluoride content in the CaF2-B2O3-GeO2-SiO2 glass. The viscous-flow point of the glass was lowered with increasing degree of ionic character obtained from Hannay's equation. |
