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Synthesis of two aminosilanes as CVD precursors of SiCxNy films: Tuning film composition by Molecular Structures |
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| Authors: | Liyong Du Yanlong Bai Wenxiang Chu |
| Institution: | School of Chemical and Material Engineering, Jiangnan University, Wuxi, Jiangsu Province, China |
| Abstract: | |
| Keywords: | Aminosilanes CVD SiCxNy films molecular structure composition |