高纯硅中补偿性杂质的光热电离光谱

首先测量了高纯n型硅样品在接近液氦温度区域内随温度变化的光热电离光谱，确定了硅样品的最佳光热电离温度范围. 在该温度范围内，在有本征带隙光照射条件下，测量了样品的高分辨率光热电离光谱，同时观察到了来自主要浅杂质施主磷以及补偿性杂质硼的正信号. 随后，应用外加磁场，对硼的光热电离光谱进行了研究，发现来自硼的光热电离信号，在外加磁场作用下，发生了由正向负信号的转变. 通过对该现象进行分析讨论，排除了该现象是温度效应的可能，指出普遍用来解释补偿性杂质光热电离响应的Darken模型存在不足，而少数载流子快速复合模关键词：高纯硅光热电离光谱元素半导体中的杂质和缺陷能级少数载流子快速复合

Compensating impurity in high purity silicon single crystal investigated by photo-thermal ionization spectroscopy

The optimum photo-thermal ionization range near liquid helium temperature for the shallow impurities in n type high purity silicon single crystal was determined experimentally. At temperature within this range, the high resolution photo-thermal ionization spectra (PTIS) of this sample were measured. Positive PTIS responses from the majority residual impurity phosphor (P) and compensating impurity boron (B) were observed by simultaneously irradiating the sample with far infrared and band-edge light. Under action of applied external magnetic fields, the positive response from compensating impurity B changes to negative response. The posibility of these phenomena being the result of temperature effect was excluded, which revealed the deficiency of Darken model and supported the model of rapid recombination of minority carriers for PTIS response of compensating impurity in elemental semiconductors.