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TDX-200透射电子显微镜自动曝光原理研究
引用本文:杨彦杰,董全林,崔永俊,李鹏,南国.TDX-200透射电子显微镜自动曝光原理研究[J].光学技术,2012,38(4):431-434.
作者姓名:杨彦杰  董全林  崔永俊  李鹏  南国
作者单位:北京航空航天大学仪器科学与光电工程学院微纳测控与低维物理教育部重点实验室,精密光机电一体化技术教育部重点实验室,国家"惯性技术"重点实验室
基金项目:国家科技支撑计划课题(2006BAK03A24)
摘    要:通过分析透射电子显微镜的曝光机理,得出了荧光屏亮度与曝光时间之间的关系表达式。设计了TDX-200透射电子显微镜自动曝光电路,并通过实验对自动曝光参数进行了标定。通过对多种实际样品在不同工作模式下进行自动曝光试验,得到了相对清晰的电子显微像。结果表明,TDX-200透射电子显微镜自动曝光的设计满足要求。

关 键 词:透射电子显微镜  自动曝光  曝光时间
收稿时间:2011/11/7

Design and realization of automatic exposure of TDX-200 transmission electron microscopy
YANG Yanjie,DONG Quanlin,CUI Yongjun,LI Peng,NAN Guo.Design and realization of automatic exposure of TDX-200 transmission electron microscopy[J].Optical Technique,2012,38(4):431-434.
Authors:YANG Yanjie  DONG Quanlin  CUI Yongjun  LI Peng  NAN Guo
Institution:(Key Laboratory of Micro-nano Measurement-Manipulation and Physics,Ministry of Education, Key Laboratory of Precision Opto-mechatronics Technology,Ministry of Education, Science and Technology on Inertial Laboratory,School of Instrumentation Science and Opto-electronics Engineering,Beihang University,Beijing 100191,China)
Abstract:By studying the exposure principle applied to transmission electron microscopy(TEM),the relational expression between current density on fluorescent screen and exposure time is deduced.The automatic exposure circuit of TDX-200 TEM is designed and the parameter value in expression is gained by the exposure experimentation with the master sample on the TDX-200 TEM.As a result,on the TDX-200 TEM,the automatic exposure experimentation on some samples is completed on the different operating modes,finally the relatively clear-cut TEM images are formed.The experimentation results indicate that the design of automatic exposure is valid.
Keywords:automatic exposure  TEM  exposure time
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