紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。

Design and fabrication of ultraviolet diffractive microlens array

In order to enhance fill factor of ultraviolet staring focal plane array and improve its detection efficiency,it can be completed by the integration between diffractive microlens and ultraviolet focal plane array.Diffractive microlens arrays are designed using scalar diffraction theory for 128×128 solar-blind ultraviolet focal plane array.The working center wavelength is 350nm,the single lens F number is F/3.56.The microlens arrays are fabricated by combination multi-coating and stripping technique.The practical processes and fabrication errors are discussed,and the optical characteristics of 128×128 diffractive microlens arrays are measured.Experimental results show that the diffraction efficiency of the diffractive microlens array is 88% with a little deviation from the theoretical value 95%.The fabrication errors are from the alignment error and the line width error.Based on their uniform optical intensity distribution,the monolithic integration between diffractive microlens and ultraviolet focal plane array can improve the ultraviolet staring focal plane array device performance.