| 飞秒激光制作微型光纤干涉传感器的研究进展 |
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| 引用本文： | 张玲,隋青美,冯德军,刘汉平.飞秒激光制作微型光纤干涉传感器的研究进展[J].光学技术,2012,38(2):250-256. |
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| 作者姓名： | 张玲 隋青美 冯德军 刘汉平 |
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| 作者单位： | 山东大学控制科学与工程学院;山东大学信息科学与工程学院;德州学院物理系 |
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| 基金项目： | 山东省自然科学基金(ZR2010FM001);山东大学自主创新基金(2010TS014);山东省高校科研发展计划(J10LA54) |
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| 摘 要： | 飞秒激光脉冲持续时间短、峰值功率高,在对物质进行处理过程中热作用区域小、加工精度高,已成为一种制作高性能、新结构光子器件的重要方法。简单介绍了飞秒脉冲激光微加工的方法和特性,归纳了飞秒激光直写技术在光纤干涉型传感器制作方面的研究进展,包括微型光纤Fabry-Perot干涉传感器和微型光纤Mach-Zehnder干涉传感器,重点介绍了这些光纤传感器的结构、特性和潜在应用。对用该技术制作的微型光纤干涉传感器进行了总结和展望。
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| 关 键 词： | 光纤通信技术 飞秒激光 微型光纤Fabry-Perot干涉仪 微型光纤Mach-Zehnder干涉仪 光纤传感器 |
| 收稿时间： | 2011/11/17 |
Recent developments in fabrication of miniature fiber-optic interferometer sensors by femtosecond laser |
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| Zhang Ling,Sui Qingmei,Feng Dejun,Liu Hanping.Recent developments in fabrication of miniature fiber-optic interferometer sensors by femtosecond laser[J].Optical Technique,2012,38(2):250-256. |
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| Authors: | Zhang Ling Sui Qingmei Feng Dejun Liu Hanping |
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| Institution: | 1.School of Control Science and Engineering,Shandong University,Jinan 250061,Shandong,China)(2.School of Information Science and Engineering,Shandong University,Jinan 250100,Shandong,China)(3.Department of Physics,Dezhou University,Dezhou 253023,Shandong,China) |
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| Abstract: | Femtosecond(fs) laser pulses have been an important new approach to fabricate photonic devices with high performance and novel structure,because the fs laser pulses have short duration,high peak power,small thermal effect area and high micromachining precision.The fs laser micromaching method and its features are briefly introduced.The recent progress on fabrication of novel miniature fiber-optic interferometer sensors by fs laser direct-writing technology is reviewed,including miniature fiber Fabry-Perot interferometer(MFFPI) sensor and miniature fiber Mach-Zehnder interferometer(MFMZI) sensor.Especially,the structures,characteristics and potential applications of these sensors are introduced.Finally,the characteristics of fiber-optic interferometer sensors fabricated by this technique are summarized and prospected. |
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| Keywords: | optical fiber communication technology femtosecond laser(fs laser) miniature fiber Fabry-Perot interferometer(MFFPI) miniature fiber Mach-Zehnder interferometer(MFMZI) fiber-optic sensor |
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