| 模糊自整定比例积分控制在空间三维纳米定位台的应用 |
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| 引用本文： | 舒强,施宁平,饶学军. 模糊自整定比例积分控制在空间三维纳米定位台的应用[J]. 光学技术, 2012, 38(2): 202-207 |
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| 作者姓名： | 舒强 施宁平 饶学军 |
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| 作者单位： | 中国科学院自适应光学重点实验室;中国科学院光电技术研究所;中国科学院研究生院 |
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| 摘 要： | 介绍了一种空间三自由度纳米定位平台,其应用背景为光刻投影物镜波像差检测系统的精密对准,因此对定位精度和定位速度都提出了很高的要求。首先简要介绍了空间三维纳米定位台;然后将模糊控制同传统PI(比例积分)控制相结合,利用定位偏差和偏差变化率信息,通过模糊推理实时调整PI控制参数,并在VC++环境下实现了模糊自整定PI参数的控制算法。实验结果表明,该控制方法较常规PI控制器能够有效地提高响应速度,减小阶跃响应超调量,保证了控制的实时性。
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| 关 键 词： | 压电驱动器 纳米定位 精密对准 模糊控制 |
| 收稿时间： | 2011-09-19 |
Control of a space three dimensional nanopositioner based on fuzzy self-adjusted PI method |
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| SHU Qiang,SHI Ningping,RAO Xuejun. Control of a space three dimensional nanopositioner based on fuzzy self-adjusted PI method[J]. Optical Technique, 2012, 38(2): 202-207 |
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| Authors: | SHU Qiang SHI Ningping RAO Xuejun |
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| Affiliation: | 1,2(1.the Key Laboratory on Adaptive Optics,Chinese Academy of Science,Chengdu 610209,Sichuan,China)(2.Institute of Optics and Electronics,Chinese Academy of Science,Chengdu 610209,Sichuan,China)(3.Graduate University of Chinese Academy of Science,Beijing 100039,China) |
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| Abstract: | A space three dimensional nanopositioner is introduced,which is used to realize precision alignment of wavefront sensors of the equipment for wavefront aberration measurement.High positioning precision and fast response are required.Firstly,the structure of the stage is introduced.Secondly,the principle of fuzzy self-adjusted PI control is explained.In Visual C++,algorithm of fuzzy self-adjusted PI is performed.Experiment results show that,compared to classic PI controller,fuzzy self-adjusted PI method exhibits better performance in both improving response speed and decreasing overshoot. |
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| Keywords: | piezo-electric actuator nano-positioning precision alignment fuzzy control |
| 本文献已被 CNKI 等数据库收录！ |
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