Combustion synthesis of high-quality diamond film suitable for application in electronic devices

The purpose of this research is to elucidate the electrical characteristics of a diamond film synthesized by combustion flame and synthesize a diamond film suitable for application in electronic devices. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electrical characteristics of the diamond film are degraded. We employed three methods to decrease the amorphous carbon in the diamond film—the detection of the optimal equivalence ratio, addition of hydrogen into synthesizing gas, and heat treatment (annealing) of the diamond film. All these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the electric characteristics of the film. We have successfully developed a method for preparing a high-quality diamond film with excellent electrical characteristics that has no dielectric loss in the wide frequency range (10²–10⁸ Hz).