Primary resonance excitation of electrically actuated clamped circular plates

We investigate the response of an electrically actuated clamped circular plate to a primary resonance excitation of its first axisymmetric mode using an analytical reduced-order model (macromodel). We discuss the inf luence of the number of modes retained in the discretization on the predicted solutions. The reduced-order model, which is a system of coupled nonlinear ordinary-dif ferential equations, accounts for general residual stress and strain hardening and allows for general material and geometric design variables. Our reduced-order model is robust up to the pull-in instability and is general enough to be an ef fective design tool for capacitive micromachined ultrasonic transducers.