Amorphous stainless steel coatings prepared by reactive magnetron-sputtering from austenitic stainless steel targets |
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Authors: | Salvatore Cusenza and Peter Schaaf |
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Institution: | (1) II. Physikalisches Institut, Universit?t G?ttingen, Friedrich-Hund-Platz 1, 37077 G?ttingen, Germany;(2) Institut für Werkstofftechnik, FG Werkstoffe der Elektrotechnik, TU Ilmenau, Postfach 10 05 65, 98684 Ilmenau, Germany |
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Abstract: | Stainless steel films were reactively magnetron sputtered in argon/methane gas flow onto oxidized silicon wafers using austenitic
stainless-steel targets. The deposited films of about 200 nm thickness were characterized by conversion electron M?ssbauer
spectroscopy, magneto–optical Kerr-effect, X-ray diffraction, scanning electron microscopy, Rutherford backscattering spectrometry,
atomic force microscopy, corrosion resistance tests, and Raman spectroscopy. These complementary methods were used for a detailed
examination of the carburization effects in the sputtered stainless-steel films. The formation of an amorphous and soft ferromagnetic
phase in a wide range of the processing parameters was found. Further, the influence of the substrate temperature and of post
vacuum-annealing were examined to achieve a comprehensive understanding of the carburization process and phase formation.
P. Schaaf’s former affiliation: II. Physikalisches Institut, Universit?t G?ttingen, Friedrich-Hund-Platz 1, 37077 G?ttingen,
Germany. |
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Keywords: | PACS" target="_blank">PACS 81 15 Cd 81 65 Lp 82 80 Ej 61 43 Dq 68 55 Jk |
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