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Monte Carlo calculation of energy loss of channeled ions
Affiliation:1. Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, DK-5230 Odense M, Denmark;2. Department of Experimental Physics, Johannes Kepler University, A-4040 Linz, Austria;1. Université de M׳sila, Faculté des sciences, Département de physique, 28000 M׳sila, Algeria;2. CNRS, LAAS, 7 avenue du colonel Roche, F-31400 Toulouse, France;3. Université de Toulouse, LAAS, F-31400 Toulouse, France;4. Université de Toulouse, UPS, LAAS, F-31400 Toulouse, France;1. Department of Electrical and Electronic Engineering, National Institute of Technology, Fukui College, Sabae, Fukui-ken 916-8507, Japan;2. SR-Center, Ritsumeikan University, Kusatsu, Shiga-ken 525-8577, Japan;1. Laboratoire de Physique de la Matière et de Rayonnement, Département de Physique, Faculté des Sciences, Université Mohamed I, Oujda, Morocco;2. Institute of Electronic, Microelectronics and Nanotechnology (IEMN), UMR CNRS 8520, Department of Physics, Faculty of Sciences and Technologies, Lille University, Villeneuve d''Ascq Cedex, France;3. Institut d''Electronique, de Microélectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Ecole Centrale de Lille, Villeneuve d''Ascq, France
Abstract:Energy distribution of 2 MeV He ions channeled in 〈100〉 Si were determined using two different models of energy loss. A comparison of the calculated results with recent experimental data on the angular dependence of the energy loss is presented.
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