Profile measurement system based on linnik-type interferometric microscope for visible-light region and infrared-light region |
| |
| Authors: | Hualing Guo |
| |
| Institution: | Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, National Key Laboratory of Science and Technology on Electronic Test and Measurement, Xueyuan Road 3, Taiyuan, Shanxi Province 030051, China |
| |
| Abstract: | A profile measurement system consisting of linnik-type interferometric microscope, light source and cameras is developed based on white-light scanning interferometry extending from the visible-light region to the infrared-light region. Three-dimensional profiles of microstructures are obtained via a phase-stepping algorithm using a CMOS array camera for the visible-light region and an InGaAs CCD array camera for the infrared-light region. Errors of the measurement system along with extensive applications in MEMS device profile reconstruction of top surface, sidewall and internal structures are discussed in detail. |
| |
| Keywords: | White-light scanning interferometry Three-dimensional profile Phase-stepping algorithm |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
