Dual-axes differential confocal microscopy with high axial resolution and long working distance |
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Authors: | Weiqian Zhao Qin Jiang Lirong Qiu Dali Liu |
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Affiliation: | Key Laboratory of Photoelectronic Imaging Technology and System (Ministry of Education of China), Opto-Electronic College, Beijing Institute of Technology, Beijing 100081, PR China |
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Abstract: | We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours. |
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Keywords: | Confocal microscopy Dual-axes differential confocal microscopy (DDCM) Thickness measurement Tracing measurement |
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