Fabrication of stabilized piezoelectric thick film for silicon-based MEMS device |
| |
Authors: | TY Kwon YB Kim K Eom DS Yoon HL Lee TS Kim |
| |
Institution: | (1) Nano-Bio Research Center, Korea Institute of Science and Technology, 39-1 Hawolgok-dong, Seongbuk-gu, Seoul, 136-791, Republic of Korea;(2) School of Advanced Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul, 120-749, Republic of Korea;(3) Department of Biomedical Engineering, Yonsei University, 234 Maegi-ri, Heungup-myeon, Wonju, Kangwondo, 220-710, Republic of Korea |
| |
Abstract: | Electrical properties of piezoelectric thick films with controlled microstructure were investigated. In order to enhance the
electromechanical properties (e.g. d31, d33) of a thick film by control of its microstructure, a mixed powder, referred to as BNP, consisting of both nano-sized and
micro-sized piezoelectric particles, was employed as a starting precursor in the film fabrication process. According to a
scanning electron microscopy study, it is shown that a BNP thick film exhibits the densest homogeneous microstructures. According
to surface area measurements, the BNP thick film was sufficiently densified without an additional infiltration process of
Pb(Zr1-xTix)O3 sol for densification. The screen-printed BNP thick film possesses a dielectric constant and a remanent polarization much
higher than those of a thick film composed of only micro-sized piezoelectric particles by a factor of more than two. This
suggests the potential application of the BNP thick film, in conjunction with a silicon substrate, to a micromachined monolithic
PZT thick film device on the silicon substrate.
PACS 85.40.Xx; 85.85.+j; 85.50.-n; 77.65.-j; 68.37.-d |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|