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(Ge/SiO)膜堆红外滤光片退化机理及其改进研究
引用本文:李忠奇,刘成赞,李正芬.(Ge/SiO)膜堆红外滤光片退化机理及其改进研究[J].光学学报,1987(7).
作者姓名:李忠奇  刘成赞  李正芬
作者单位:昆明物理研究所 (李忠奇,刘成赞),昆明物理研究所(李正芬)
摘    要:本文根据(Ge/SiO)膜堆红外滤光片特性退化的实验,讨论了特性退化机理,从而找到了改进特性退化的方法,并制备出能经受水、盐水和酸溶液浸泡的优质(Ge/SiO)膜堆红外滤光片。

关 键 词:类金刚石碳膜  双半波滤光片

Investigation of degeneration mechanism and improvement method of infrared (Ge/SiO) stack filters
LI ZHONGQI,LIN CHENZAN AND Li ZHeRGEN.Investigation of degeneration mechanism and improvement method of infrared (Ge/SiO) stack filters[J].Acta Optica Sinica,1987(7).
Authors:LI ZHONGQI  LIN CHENZAN AND Li ZHeRGEN
Institution:Kunming Institute of Physics
Abstract:The degeneration mechanism of characteristics of infrared (Ge/SiO) stack filters is discussed based on experimental results. We propose a method to prevent such degeneration of characteristics. By using the method, high-quality filters have been obtained which can withstand immersion tests in water and solutions of salt or acid.
Keywords:diamond-like carbon film  double half-ware filter    
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