Ultramicrohardness tester for use in a scanning electron microscope

Summary A novel microhardness-tester has been designed for loads between 10^–2 N and 5 x 10^–5 N. The apparatus can be operated in a scanning electron microscope without installation of additional adjusting shafts. The force is generated electromagnetically, transduced to the indenter (diamond cone or pyramid) by bending a double leaf spring, and measured by means of strain gauges fixed to the springs. The indentation cycle is fully programmable and is controlled by the strain gauge signal. The equipment can be tilted with respect to the electron beam thus making possible the observation of the tip during indentation.With 2 figures