基于力矩主动校正的反射镜支撑分析

基于力校正的主动支撑技术已广泛应用于光学镜面支撑,而基于力矩校正的方法目前还鲜有研究,为了深入探讨该课题,在传统力促动器主动支撑的基础上引入了基于力矩校正的反射镜主动支撑.首先,从镜面主动支撑原理出发,介绍了镜面面形主动校正的分类,着重对比分析了力校正和力矩校正的优缺点.进而,根据力矩主动校正的特点,利用在反射镜背部施加3组等效力矩的方法,对一块400 mm口径的轻量化反射镜进行了静力学分析与优化,拟合后镜面变形RMS值由原来的331 nm降为9.35 nm,优化率为97%.分析结果表明,基于力矩校正的主动支撑是有效的,同时为主动支撑的智能化及多样化提供了一种新的思路.

Analysis of mirror support based on active moment correction

Active support based on axial force correction was widely applied to optical mirror support, while the research of moment correction was infrequency. In order to profoundly develop such study, the active support based on moment correction was introduced in the foundation of force correction. First, according to the principle of active support, the category of active correction for mirror surface was introduced. Especially, the difference between force correction and moment correction was compared in detail. Then a lightweight mirror with the aperture of 400 mm was selected to be calculated and optimized in statics, according to applying three groups equivalent moments. As a result, the mirror deformation was reduced from 331 nm to 9.35 nm, the rate of optimization was 97%. In conclusion, the active support based on moment correction was effective, and a new idea was introduced for an smart and diversified active support.