| 低气压微波感耦氩等离子体空间分布特性光谱诊断 |
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| 引用本文： | 雷杰,付宏郎.低气压微波感耦氩等离子体空间分布特性光谱诊断[J].光谱学与光谱分析,1992,12(3):43-48. |
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| 作者姓名： | 雷杰 付宏郎 |
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| 作者单位： | 云南大学物理系，云南大学物理系，云南大学物理系，云南大学物理系 650091 昆明，650091 昆明，650091 昆明，650091 昆明 |
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| 摘 要： | 用二维光学多道分析仪研究了低气压表面波型微波感耦氬等离子体的光谱辐射特性?鼳bel反演后,得到了在各种气压和微波功率下等离子体辐射光强和激发温度的空间分布及其变化规律。讨论了此等离子体的激发机理。
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| 关 键 词： | 辐射光谱 激发机理 氩－MIP |
SPATIALLY RESOLVED SPECTROSCOPIC DIAGNOSTICS OF A LOW PRESSURE ARGON MICROWAVE-INDUCED PLASMA |
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| LEI Jie,FU Honglang,PU Xiaoyun and LIN Lizhong.SPATIALLY RESOLVED SPECTROSCOPIC DIAGNOSTICS OF A LOW PRESSURE ARGON MICROWAVE-INDUCED PLASMA[J].Spectroscopy and Spectral Analysis,1992,12(3):43-48. |
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| Authors: | LEI Jie FU Honglang PU Xiaoyun and LIN Lizhong |
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| Institution: | LEI Jie,FU Honglang,PU Xiaoyun and LIN Lizhong Department of Physics,Yunnan University,950091 Kunming |
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| Abstract: | Emission spectra of a low pressure argon microwave-induced plasma sustained by a surfatron were studied using OMA-3. After Abel inversion, the spatial distributions of emission spectral intensities and excitation temperatures of the plasma were given at different argon pressures and microwave powers. The excitation mechanism of the plasma was discussed. |
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| Keywords: | Low pressure Ar-MIP Emission spectra Excitation temperature Spatial distribution Excitation mechanism |
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