Phase-shifting mask design for interference exposure of chirp blazed grating |
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Authors: | Shogo Ura Kenji Kintaka Hideyuki Awazu Yasuhiro Awatsuji Junji Nishii |
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Institution: | 1.Department of Electronics,Kyoto Institute of Technology,Kyoto,Japan;2.Photonics Research Institute,National Institute of Advanced Industrial Science and Technology,Tsukuba, Ibaraki,Japan;3.Research Institute for Electronic Science,Hokkaido University,Sapporo,Japan |
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Abstract: | An interference exposure system using a phase-shifting mask was proposed for generating periodic sawtooth optical intensity
profile with chirp in period. Multiple space-harmonic waves are launched from the mask by diffraction, and the sawtooth optical
intensity is formed by interference based on Fourier synthesis after propagation through an air gap. The design concept merely
utilizing positive diffraction-order harmonics with tilt illumination of an exposure light and a design algorithm based on
time-reversed configuration for calculating required phase shift amount were proposed and discussed. A phase-shifting mask
for a blazed grating of very high chirp rate was designed to demonstrate its potential and feasibility. The grating period
changes from 2.2 to 3.1 μm gradually within 0.3 mm length. Sawtooth-like optical intensity profile was confirmed by theoretical
simulation as well as preliminary experimental results. |
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Keywords: | |
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