Structural heterogeneity in chalcogenide glass films prepared by thermal evaporation |
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| Institution: | 1. Departamento de Engenharia de Materiais/ICEMS, Instituto Superior Técnico/TULisbon, Av. Rovisco Pais, 1049-001 Lisboa, Portugal;2. Department of Materials Science and Engineering, Lehigh University, 5 East Packer Avenue, East Bethlehem, PA 18015, USA |
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| Abstract: | GeSe2 and Ge28Sb12Se60 chalcogenide glass thin films have been deposited on single crystal silicon substrates by vacuum thermal evaporation. The surface morphology of these films has been investigated by field emission-scanning electron microscopy and atomic force microscopy, revealing heterogeneities in their microstructure consisting of granular regions ～15–50 nm in size, which were coarser in the case of the GeSe2 films. Typical RMS film surface roughness values were ～0.9–1.3 nm. |
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